Method and apparatus for detecting a leak of external air into a plasma reactor
AssigneeSTMicroelectronics S.r.l.
InventorsFrancesco Ciovacco, Fabio Somboli, Giuseppe Fazio, Simone Alba
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Abstract
A method (300) and a corresponding apparatus for detecting a leak of external air into a plasma reactor are proposed. The method includes: establishing (340) a plasma inside the reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with the air, detecting (345) a light emission of the plasma, and analyzing (350-375) the light emission to identify the presence of the at least one predetermined compound.
Claims31
A method of detecting a leak of external air into a plasma reactor, comprising:
- establishing a plasma inside a reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with air,
- detecting a light emission of the plasma, and
- analyzing the light emission to identify the presence of the at least one predetermined compound.
A computer readable medium comprising computer instructions for a data processing system, the computer instructions comprising instructions for:
- establishing a plasma inside a reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with air,
- detecting a light emission of the plasma, and
- analyzing the light emission to identify the presence of the at least one predetermined compound.
An apparatus comprising:
- means for establishing a plasma inside a plasma reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with air;
- means for detecting a light emission of the plasma;
- and
- means for analyzing the light emission to identify the presence of the at least one predetermined compound for detecting a leak of external air into the plasma reactor.
A system comprising:
- a plasma reactor;
- and
- an apparatus, coupled to the plasma reactor, for detecting a leak of external air into the plasma reactor, the apparatus comprising:
- means for establishing a plasma inside the plasma reactor, the plasma having a composition suitable to generate at least one predetermined compound when reacting with air;
- means for detecting a light emission of the plasma;
- and
- means for analyzing the light emission to identify the presence of the at least one predetermined compound for detecting a leak of external air into the plasma reactor.
Dependencies are inferred from the claim text.