Localized biasing for silicon on insulator structures
AssigneeMicron Technology, Inc.
InventorsFernando Gonzalez, John Zahurak
Life of this patent
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Abstract
A silicon-on-insulator device has a localized biasing structure formed in the insulator layer of the SOI. The localized biasing structure includes a patterned conductor that provides a biasing signal to distinct regions of the silicon layer of the SOI. The conductor is recessed into the insulator layer to provide a substantially planar interface with the silicon layer. The conductor is connected to a bias voltage source. In an embodiment, a plurality of conductor is provided that respectively connected to a plurality of voltage sources. Thus, different regions of the silicon layer are biased by different bias signals.
Claims20
A method of forming a silicon-on-insulator structure, comprising:
- providing a silicon-on-insulator substrate;
- forming a recess in an insulator layer;
- depositing a conductor in the recess;
- and
- forming a semiconductor device over the conductor.
A method, comprising:
- providing a substrate:
- forming an insulator layer on the substrate;
- forming a conductor in the insulator layer;
- forming a silicon layer on the insulator layer and the conductor;
- forming an integrated circuit device having a body region in the silicon layer;
- and
- wherein forming the integrated circuit device includes forming the body region in electrical contact with the conductor.
A method, comprising:
- providing a substrate:
- forming an insulator layer on the substrate;
- depositing a patterned resist on the insulator layer;
- etching the insulator layer in areas of the insulator not covered by resist to form a recess;
- depositing a conductor in the recess;
- forming a silicon layer on the insulator layer and the conductor;
- forming an integrated circuit device having a body region in the silicon layer;
- and
- wherein forming the integrated circuit device includes forming the body region in electrical contact with the conductor.
Dependencies are inferred from the claim text.