Waveguide for thermo optic device

A method, comprising:

• forming a lower cladding;
• forming an input and output waveguide on the lower cladding, the input and output waveguides each having a waveguide formation height;
• and
• attenuating the waveguide formation height of one of the input waveguide and the output waveguides.

A method, comprising:

• forming a lower cladding;
• forming a plurality of waveguides on the lower cladding, each of the waveguides having a waveguide formation height;
• forming a resonator on the lower cladding, the resonator having a resonator formation height;
• and
• attenuating the waveguide formation height of each of the plurality of waveguides.

A method, comprising:

• depositing a first layer on a substrate;
• depositing a second layer on the first layer;
• masking the second layer;
• photo impacting the second layer to form a photo impacted region therein;
• etching the second layer to form a plurality of waveguides and a resonator on the first layer, each of the waveguides having a waveguide formation height, the resonator having a resonator formation height, the waveguide formation heights and the resonator formation height being substantially equal;
• masking one of the waveguides;
• and
• etching the one of the waveguides to form an attenuated waveguide having a height less than the waveguide formation height.

A method of forming a thermo optic device, comprising:

• providing a substrate;
• forming a lower cladding on the substrate;
• forming an input and output waveguide on the lower cladding, the input and output waveguides each having a waveguide formation height;
• forming a plurality of resonators on the lower cladding between the input and output waveguides to couple a light signal from the input waveguide to the output waveguide during use, each of the resonators having a resonator formation height;
• attenuating one of the waveguide formation heights and resonator formation heights;
• and
• forming an upper cladding on the input and output waveguides and the plurality of resonators.

A method of forming a thermo optic device, comprising:

• providing a substrate;
• forming a lower cladding on the substrate;
• forming an input and output waveguide on the lower cladding, the input and output waveguides each having a waveguide formation height;
• forming a resonator on the lower cladding between the input and output waveguides to couple a light signal from the input waveguide to the output waveguide during use, the resonator having a resonator formation height;
• masking one of the input and output waveguides;
• and
• etching the one of the input and output waveguides to form an attenuated waveguide having a height less than the waveguide formation height.