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US 2005/0030699 A1Published application
Shielded capacitor structure
AssigneeSilicon Laboratories Inc.
InventorsSusanne Paul, Timothy Dupuis, Ali Niknejad
Life of this patent
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Abstract
A method and apparatus if provided for shielding a capacitor structure formed in a semiconductor device. In a capacitor formed in an integrated circuit, one or more shields are disposed around layers of conductive strips to shield the capacitor. The shields confine the electric fields between the limits of the shields.
Claims21
A capacitor structure formed on a semiconductor substrate for providing capacitance between a first node and a second node comprising:
- one or more layers of conductive strips, said conductive strips in each layer alternately connected to the first and second nodes, and
- a conductive plate disposed beneath the lowest of the one or more layers of conductive strips.
21-52. (cancelled)
Dependencies are inferred from the claim text.