Photolithographic techniques for producing angled lines

A magnetic random access memory (MRAM) array formed by a method, comprising:

• forming a first wiring layer of approximately parallel conductors using a first reticle;
• forming a second wiring layer of approximately parallel conductors using a second reticle such that the conductors of the second wiring layer cross with the conductors of the first wiring layer at a number of intersections;
• forming a third wiring layer of approximately parallel conductors using a third reticle such that the conductors of the third wiring layer cross the conductors of the first wiring layer and the second wiring layer at the number of intersections;
• and
• forming a layer of magnetic storage elements proximately located to the intersections and adapted to be written by a first magnetic field produced by energized conductors in the first wiring layer, a second magnetic field produced by energized conductors in the second wiring layer, and a third magnetic field produced by energized conductors in the third wiring layer,
• wherein at least one of the first wiring layer, the second wiring layer and the third wiring layer is formed so as to be non-orthogonal with respect to a remaining at least one of the first wiring layer, the second wiring layer and the third wiring layer.

A raster-based photolithographic system for forming orthogonal and non-orthogonal images on a reticle, comprising:

• an imager and a worktable adapted to function to orthogonally image the reticle in an X direction and a Y direction using a raster motion, and to adjust a rotational position of the reticle with respect to the raster motion;
• a database, including a first data set for writing an orthogonal image with respect to the raster motion and a second data set corresponding for writing a non-orthogonal image with respect to the raster motion;
• an X-controller to control imaging of reticles in an X direction;
• a Y-controller to control imaging of reticles in a Y direction;
• and
• a θ-controller to control an adjustment of the rotational position of the reticle with respect to the raster motion.

A raster-based photolithographic system for forming orthogonal and non-orthogonal images on a workpiece, comprising:

• a worktable to receive a workpiece, the worktable having a controlled linear motion along a Y axis, the worktable being adapted to hold the workpiece in at least a first predetermined rotational position (θ1) and a second predetermined rotational position (θ2);
• an imager having a controlled linear motion along an X axis;
• a database, including a first data set corresponding to the first rotational position θ1 for writing an orthogonal first image with respect to a reference and a second data set corresponding to the second rotational position θ2 for writing a non-orthogonal second image with respect to the reference;
• an X-motion controller to control the motion of the imager along the X axis using the first data set when the workpiece is in the first rotational position θ1 and the second data set when the workpiece is in the second rotational position θ2;
• and
• a Y-motion controller to control the motion of the worktable along the Y axis using the first data set when the workpiece is in the first rotational position θ1 and the second data set when the workpiece is in the second rotational position θ2.