A micro-electrical-mechancal system (mems) device having a plurality of pairs of reflective element actuators located on opposing sides of a reflective element and a method of manufacture therefor
AssigneesLucent Technologies Inc., Agere Systems Inc.
InventorsCristian Bolle, Edward Chan
Life of this patent
Estimating the term…
Abstract
A micro-electrical-mechanical system (MEMS) device and a method of manufacture therefor. The micro-electrical-mechanical system includes a reflective element and a reflective element actuator located adjacent a perimeter of the reflective element and outside a path of motion of the reflective element.
Claims35
A micro-electrical-mechanical system device, comprising:
- a reflective element;
- and
- a plurality of pairs of reflective element actuators located on opposing sides of the reflective element, wherein each pair of the plurality is located at differing distances outside and adjacent a path of motion of there reflective, element and are configured to move the reflective element different amounts in a same direction.
2-3. (cancelled).
A method of manufacturing a micro-electrical-mechanical system device, comprising the steps of:
- forming a reflective element;
- and
- forming a plurality of pairs of reflective element actuators on opposing sides of the reflective element, wherein each pair of the plurality is located at differing distances outside and adjacent a path of motion of the reflective element, and are configured to move the reflective element different amounts in a same direction.
13-14. (cancelled).
An optical communications system, comprising:
- input/output fiber bundles;
- a reflective element positioned to receive radiation from the input/output fiber bundles;
- and
- a plurality of pairs of reflective element actuators located on opposing sides of the reflective element, wherein each pair of the plurality is located at differing distances outside and adjacent a path of motion of the reflective element and are configured to move there reflective element different amounts in a same direction.
A method of operating a micro-electrical-mechanical system device, comprising:
- applying a first bias voltage between a reflective element and a first pair of reflective element actuators located outside a path of motion of the reflective element, causing the reflective element to move to a first location in a direction;
- then
- applying a second bias voltage between the reflective element and a second pair of reflective element actuator actuators located outside a path of motion of the reflective element, causing the reflective element to move to a second location in the direction.
(cancelled).
A micro-electrical-mechanical system device, comprising
- a reflective means for reflecting an amount of radiation;
- and
- an actuation means located adjacent a perimeter of the reflective me and outside a path of motion of the reflective means for positioning the reflective means, wherein the actuation means includes a plurality of pairs of actuator means located on opposing sides of the reflective means, wherein each pair of the plurality is located at differing distances along the path of motion, and are configured to move the reflective element different amounts in a sa direction.
29-30. (cancelled).
Dependencies are inferred from the claim text.