Processing of substrates with dense fluids comprising acetylenic diols and/or alcohols

A dense cleaning fluid for removing contaminants from a substrate, the dense cleaning fluid comprising:

• a dense fluid,
• at least one acetylenic alcohol or acetylenic diol represented by the following formulas (A) or (B):
• wherein R, R1, R3, and R4 are independently a hydrogen atom, a linear alkyl group comprised of from 1 to 34 carbon atoms, a branched alkyl group comprised of from 2 to 34 carbon atoms, and R2 and R5 are each independently a hydrogen atom;
• a hydroxyl terminated poly(alkylene oxide) chain derived from 1 to 30 alkylene oxide monomer units of the following formula (C):
• wherein R6, R7, R8, and R9 are independently a hydrogen atom, a linear alkyl group comprised of from 1 to 5 carbon atoms, a branched alkyl group comprised of from 2 to 5 carbon atoms, or a cyclic alkyl group comprised of from 3 to 5 carbon atoms;
• an interactive functional group;
• and combinations thereof;
• and
• at least one processing agent selected from the group consisting of a co-solvent, a surfactant, a chelating agent, and combinations thereof.

A dense cleaning fluid for removing contaminants from a substrate, the dense cleaning fluid comprising:

• 20 to 99 weight percent of a dense fluid;
• 1 to 20 weight percent of at least one acetylenic diol or acetylenic alcohol represented by the following formulas (A) or (B):
• wherein R, R1, R3, and R4 are independently a hydrogen atom, a linear alkyl group comprised of from 1 to 34 carbon atoms, a branched alkyl group comprised of from 2 to 34 carbon atoms, and R2 and R5 are each independently a hydrogen atom;
• a hydroxyl terminated poly(alkylene oxide) chain derived from 1 to 30 alkylene oxide monomer units of the following formula (C):
• wherein R6, R7, R8, and R9 are independently a hydrogen atom, a linear alkyl group comprised of from 1 to 5 carbon atoms, a branched alkyl group comprised of from 2 to 5 carbon atoms, or a cyclic alkyl group comprised of from 3 to 5 carbon atoms;
• an interactive functional group;
• and combinations thereof;
• 0 to 40 weight percent of at least one cosolvent selected from the group consisting of an ester, an ether, an alcohol, a nitrile, a hydrated nitrile, a glycol, a monester glycol, a ketone, a fluorinated ketone, a tertiary amine, an alkanolamine, an amide, a carbonate, a carboxylic acid, an alkane diol, an alkane, a peroxide, a water, an urea, a haloalkane, a haloalkene, and combinations thereof;
• and,
• 0 to 20 weight percent of at least one chelating agent selected from the group consisting of a beta-diketone, a carboxylic acid, an oxine, a tertiary amine, a tertiary diamine, a tertiary triamine, a nitrile, a beta-ketoimine, an ethylenediamine tetraacetic acid and derivatives thereof, a catechol, a choline-containing compound, a trifluoroacetic anhydride, an oxime, a dithiocarbamate, and combinations thereof.

A dense cleaning fluid for removing contaminants from a substrate, the dense cleaning fluid comprising:

• a dense fluid;
• and
• at least one derivatized acetylenic alcohol or a derivatized acetylenic diol wherein the derivatized alcohol or the derivatized diol comprises at least one interactive functional group selected from the group consisting of an amine and acid functional group;
• an ester functional group;
• an ether and alcohol functional group;
• an ester and alcohol functional group;
• a nitrile functional group;
• a carbonate functional group;
• and combinations thereof.

A method for removing contaminants from a substrate the method comprising contacting the substrate with a dense cleaning fluid comprising:

• a dense fluid;
• at least one acetylenic alcohol or acetylenic diol represented by the following formulas (A) or (B):
• wherein R, R1, R3, and R4 are independently a hydrogen atom, a linear alkyl group comprised of from 1 to 34 carbon atoms, a branched alkyl group comprised of from 2 to 34 carbon atoms, and R2 and R5 are each independently a hydrogen atom;
• a hydroxyl terminated poly(alkylene oxide) chain derived from 1 to 30 alkylene oxide monomer units of the following formula (C):
• wherein R6, R7, R8, and R9 are independently a hydrogen atom, a linear alkyl group comprised of from 1 to 5 carbon atoms, a branched alkyl group comprised of from 2 to 5 carbon atoms, or a cyclic alkyl group comprised of from 3 to 5 carbon atoms;
• an interactive functional group;
• and combinations thereof.

A method for removing contaminants from a substrate, the method comprising:

• introducing the substrate comprising contaminants into a processing chamber;
• contacting the substrate with a dense cleaning fluid comprising a dense fluid and at least one processing agent selected from the group consisting of an acetylenic alcohol, an acetylenic diol, a derivatized acetylenic alcohol, a derivatized acetylenic diol, a cosolvent, a chelating agent, a surfactant, and combinations thereof to provide a spent dense fluid and a treated substrate;
• and
• separating the contaminants and the at least one processing agent from the spent dense fluid.

A method for removing contaminants from a substrate, the method comprising:

• introducing the substrate comprising contaminants into a processing chamber;
• combining a dense fluid, at least one fluorinated dense fluid, and at least one processing agent to provide a dense cleaning fluid;
• contacting the substrate with the dense cleaning fluid to provide a spent dense cleaning fluid and a treated substrate;
• separating the contaminants and the at least one processing agent from the spent dense cleaning fluid;
• and
• separating at least one fluorinated dense fluid from the spent dense cleaning fluid wherein the at least one fluorinated dense fluid is purified to provide a purified fluorinated dense fluid and wherein at least a portion of the at least one fluorinated dense fluid in the combining step comprises the purified fluorinated dense fluid.