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US 2005/0029014 A1Published application
Conductive sheet having conductive layer with improved adhesion and product including the same
OwnerShigeki Miurainventor
Life of this patent
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Abstract
A conductive sheet according to the present invention includes: an insulating substrate having at least one via hole, a ground conductive layer; and a top conductive layer, and characterized in that the via hole is a fine pore penetrating through the insulating substrate, the ground conductive layer is formed by a sputtering method or a vapor deposition method on all of a surface of the insulating substrate, the top conductive layer is formed on all of or part of a surface of the ground conductive layer, and the via hole is filled with the top conductive layer.
Claims16
A conductive sheet, comprising:
- an insulating substrate having at least one via hole;
- a deterioration preventing layer;
- a ground conductive layer;
- and a top conductive layer, wherein
- said insulating substrate is irradiated with ions by an ion gun,
- said via hole is a fine pore penetrating through said insulating substrate,
- said deterioration preventing layer constituted by at least one element selected from the group consisting of Ni, Cr, Co, Zn and Si or by one of an alloy, an oxide and a nitride containing said at least one element is formed by a sputtering method or a vapor deposition method on all of a surface of said insulating substrate including a wall surface of said via hole,
- said ground conductive layer is formed by the sputtering method or the vapor deposition method on all of a surface of said deterioration preventing layer,
- said top conductive layer is formed by an electroplating method on all of or part of a surface of said ground conductive layer, and
- said via hole is filled with said top conductive layer concurrently with formation of said top conductive layer.
7 more elements
A conductive sheet, comprising:
- an insulating substrate having at least one via hole;
- a metal foil;
- a deterioration preventing layer;
- a ground conductive layer;
- and a top conductive layer, wherein
- said metal foil is bonded to one surface of said insulating substrate,
- said insulating substrate is irradiated with ions by an ion gun,
- said via hole is a fine pore penetrating only through said insulating substrate,
- said deterioration preventing layer constituted by at least one element selected from the group consisting of Ni, Cr, Co, Zn and Si or by one of an alloy, an oxide and a nitride containing said at least one element is formed by a sputtering method or a vapor deposition method on a wall surface of said via hole and on the other surface of said insulating substrate without said metal foil being bonded,
- said ground conductive layer is formed by the sputtering method or the vapor deposition method on all of a surface of said deterioration preventing layer,
- said top conductive layer is formed by an electroplating method on all of or part of a surface of said ground conductive layer, and
- said via hole is filled with said top conductive layer concurrently with formation of said top conductive layer.
9 more elements
Dependencies are inferred from the claim text.