Uniform pressing apparatus

A uniform pressing apparatus applicable to a nanoimprint lithographic process, comprising:

• a housing having at least one opening and formed with a first flange extending in a first direction from periphery of the opening;
• a first carrier unit for carrying an imprint mold, the first carrier unit being formed with a second flange extending in a second direction opposite to the first direction, allowing the second flange to be movably attached to the first flange to form surface contact between the first flange and the second flange such that the first carrier unit moves along with movement of the housing;
• a second carrier unit for carrying a substrate with a moldable layer formed thereon, wherein the moldable layer faces toward the imprint mold;
• at least one uniform pressing unit comprising a closed flexible membrane and fluid filling the closed flexible membrane, the uniform pressing unit being mounted on a path to transmit force required for imprinting;
• and
• a driving unit for feeding and driving at least one of the housing and the second carrier unit, to allow the imprint mold to come into contact with the moldable layer, making the second flange separated from the first flange via the contact between the imprint mold and the moldable layer, and keeping the uniform pressing unit being pressed to perform the nanoimprint lithographic process.