Helical microelectronic contact and method for fabricating same
AssigneeFormFactor, Inc.
InventorsScott E. Lindsey, Charles A. Miller, David M. Royster, Stuart W. Wenzel
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AssigneeFormFactor, Inc.
InventorsScott E. Lindsey, Charles A. Miller, David M. Royster, Stuart W. Wenzel
Estimating the term…
A microelectronic spring contact for making electrical contact between a device and a mating substrate and method of making the same are disclosed. The spring contact has a compliant pad adhered to a substrate of the device and spaced apart from a terminal of the device. The compliant pad has a base adhered to the substrate, and side surfaces extending away from the substrate and tapering to a smaller end area distal from the substrate. A trace extends from the terminal of the device in a coil pattern over the compliant pad to its end area, forming a helix. At least a portion of the compliant pad end area is covered by the trace, and a portion of the trace that is over the compliant pad is supported by the compliant pad. In an alternative embodiment, the pad is removed to leave a freestanding helical contact.
A microelectronic contact for making electrical contact between a terminal of a device substrate and a mating component, the contact comprising:
A microelectronic contact structure comprising:
(Cancelled)
The method of claim 21, wherein the providing step further comprises:
A method for making a microelectronic contact comprising:
The method of claim 21, wherein the patterning a trace step further comprises depositing a metallic material by a method selected from chemical vapor deposition, physical vapor deposition, and sputtering.
(Cancelled)
The method of claim 17, wherein the etching a pit step further comprises etching a pit having a shape selected from pyramidal, truncated pyramidal, stepped pyramidal, conical, hemispherical, prism-shaped, and truncated prism-shaped.
The method for making a microelectronic contact comprising:
A method for making a microelectronic contact comprising:
(Cancelled)
A method for making a microelectronic contact comprising:
Dependencies are inferred from the claim text.