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US 2004/0201841 A1Published application
Apparatus and method for detecting particles on an object
AssigneeSamsung Electronics Co., Ltd.
InventorsDeok-Yong Kim, Duck-Sun Yang
Life of this patent
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Abstract
An apparatus for detecting particles located on an object includes an emitter for irradiating lights to the particles. The object is disposed on a stage in a direction substantially parallel to a surface of the object. The apparatus further includes a driver for generating a relative motion between the emitter and the object for scanning the surface of the object with the lights and a detector for detecting the lights emitted from the emitter or lights scattered from the particle. With embodiments of the present invention, the particles can be quickly detected.
Claims31
An apparatus for detecting particles located on an object comprising:
- an emitter for irradiating lights to the particles, the object being disposed on a stage in a direction substantially parallel to a surface of the object;
- a driver for generating a relative motion between the emitter and the object for scanning the surface of the object with the lights;
- and
- a detector for detecting the lights emitted from the emitter or lights scattered from the particle.
1 more element
An apparatus for detecting particles located on an object comprising:
- an emitter for irradiating a first light and a second light to the particles, the object being disposed on a stage in a first direction and a second direction which are substantially parallel to a surface of the object;
- a first driver for generating a relative [rotary]motion between the emitter and the object for irradiating the first and second lights to the surface of the object;
- a second driver for generating a relative motion between the emitter and the object for scanning the surface of the object with the first and second lights;
- a detector for detecting the first and second lights emitted from the emitter or the first and second lights scattered from the particles, and for producing a first and second detection signals and a relative position signal between the emitter and the object;
- and
- a data processor for analyzing the first and second detection signals and the relative position signal between the emitter and the object from the detector to determine the position of the particles.
3 more elements
An apparatus for detecting particles located on an object comprising:
- a first emitter for irradiating a first light to the particles on the object disposed on a stage in a first direction substantially parallel to a surface of the object;
- a second emitter for irradiating a second light to the particles in a second direction substantially parallel to the surface of the object;
- a first driver for generating a first relative motion between the first emitter and the object to scan the surface of the object by the first light;
- a second driver for generating a second relative motion between the second emitter and the object to scan the surface of the object by the second light;
- a detector for detecting the first and second emitted lights or the first and second lights scattered from the particles, and for generating first and second detection signals to determine positions of the particles;
- and
- a data processor for analyzing the first and second detection signals to determine positions of the particles, the first and second detection signals comprising a first relative position signal between the first emitter and the object and a second relative position signal between the second emitter and the object from the detector.
4 more elements
A method for detecting particles located on an object comprising:
- irradiating a light from an emitter to the particles on the object in a direction substantially parallel to a surface of the object;
- generating a relative motion between the emitter and the object during irradiation of the light to scan the surface of the object with the light;
- and
- detecting the light irradiated from the emitter or the light scattered from the particles.
1 more element
A method for detecting particles located on an object comprising:
- irradiating a first light from an emitter to the particles on the object in a first direction substantially parallel to a surface of the object;
- generating a first relative motion between the emitter and the object during irradiation of the first light to scan the surface of the object with the first light;
- detecting the first light irradiated from the emitter or a first light scattered from the particle;
- generating a relative motion between the emitter and the object;
- irradiating a second light from the emitter to the particles in a second direction that is different from the first direction and is parallel to the surface of the object;
- generating a second relative motion between the emitter and the object during irradiation of the second light to scan the surface of the object with the second light;
- detecting the second light irradiated from the emitter or a second light scattered from the particles;
- and
- analyzing first and second detection signals and a relative position signal between the emitter and the object created from detecting the first and second lights to recognize a position of the particles.
6 more elements
A method for detecting particles on an object comprising:
- irradiating a first light from a first emitter to particles on the object in a first direction substantially parallel to a surface of the object;
- generating a first relative motion between the first emitter and the object in a third direction different from the first direction during irradiation of the first light to scan the surface of the object by the first light;
- detecting the first light irradiated from the emitter or a first light scattered from the particles;
- irradiating a second light from a second emitter to the particle in a second direction that is different from the first direction and is substantially parallel to the surface of the object;
- generating a second relative motion between the second emitter and the object in a fourth direction different from the second direction during irradiation of the second light to scan the surface of the object by the second light;
- detecting the second light irradiated from the emitter or a second light scattered from the particles;
- and
- analyzing first and second detection signals to determine the positions of the particles, the first and second detection signals comprising a relative position signal between the emitter and the object created from detecting the first and second lights.
5 more elements
Dependencies are inferred from the claim text.