Sample positioning system to improve edge measurements
AssigneeTherma-Wave, Inc.
InventorsJeffrey T. Fanton, Craig Uhrich
Life of this patent
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Abstract
Systems and methods for operating an optical measurement system are disclosed which permit measurements to be made more uniformly in regions close the edge of a sample, such as a wafer. An optical measurement system can include a probe beam that is focused to an elliptically shaped spot on the surface of the sample. Improved measurements near the edge of the sample can be obtained by rotating the wafer with respect to the measurement spot to ensure that the short axis of the ellipse is perpendicular to the wafer edge.
Claims7
A method for inspecting a sample with a probe beam, said probe beam being focused to a spot onto the sample surface, said spot having a generally elliptical shape with a long and a short axis, with the properties of the probe beam being measured after reflection from the sample, the method comprising:
- determining a proximity of an inspection spot on the sample surface to an edge of the sample;
- and
- positioning the sample with respect to the probe beam such that when the inspection spot is determined to be close to the edge of the sample, the probe beam spot falls on the inspection spot with the short axis being substantially perpendicular to the sample edge, the positioning of the sample including rotating the sample with respect to the probe beam in order to minimize an area of the sample which cannot be accurately inspected.
A system for inspecting a sample, comprising:
- a probe beam source capable of focusing a probe beam spot on the sample surface, said probe beam spot having a generally elliptical shape with a long and a short axis;
- and
- a movable stage for supporting the sample and adjusting the position of the sample with respect to the probe beam, the moveable stage being capable of both rotational and linear movement, the moveable stage capable of positioning the sample with respect to the probe beam such that when an inspection spot is determined to be close to the edge of the sample, the probe beam spot falls on the inspection spot with the short axis being substantially perpendicular to the sample edge, the positioning of the sample including rotating the sample with respect to the probe beam in order to minimize an area of the sample which cannot be accurately inspected.
Dependencies are inferred from the claim text.