Pattern formation apparatus and manufacturing method thereof
OwnerKaoru Higuchi, Hitoshi Isono +2inventors
InventorsKaoru Higuchi, Hitoshi Isono, Tomoyuki Sagara, Chiyoshi Yoshioka
Life of this patent
Estimating the term…
Abstract
In a pattern forming apparatus that forms a pattern by jetting out an ink from nozzle opening sections of nozzles, the nozzles are formed by bonding a top plate to a surface of a substrate on which a concave section is formed, and the substrate is combined with the top plate by melting a combining layer formed on at least one of the substrate and the top plate. With this, the shape accuracy of the nozzle opening sections of the pattern forming apparatus is ensured.
Claims18
A pattern formation apparatus, comprising:
- a substrate including a concave section;
- a top plate that is combined with a surface of the substrate where the concave section is provided;
- a combining layer, provided on at least one of the substrate and the top plate, via which the substrate and the top plate are combined with each other, and
- nozzles formed by melting the combining layer such that the substrate and the top plate are combined with each other, the nozzles jetting out ink such that a pattern is formed.
A method for manufacturing a pattern formation apparatus, comprising the steps of:
- (i) combining a surface of a substrate where a concave section is provided with a top plate such that nozzles for jetting out ink are formed;
- and
- (ii) melting a combining layer, provided on at least one of the substrate and the top plate, such that the substrate and the top plate are combined with each other via the molten combining layer.
Dependencies are inferred from the claim text.