Solution jet type fabrication apparatus, method, solution containing fine particles, wiring pattern substrate, device substrate
AssigneeRicoh Company, Ltd.
InventorTakuro Sekiya
Life of this patent
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AssigneeRicoh Company, Ltd.
InventorTakuro Sekiya
Estimating the term…
A solution jet type fabrication apparatus for fabricating a wiring pattern or a device, the solution jet type fabrication apparatus including a jet head for ejecting a droplet of a solution containing fine particles onto a substrate, so as to form a pattern, by vaporizing a volatile ingredient of the solution, and allowing a solid component to remain on the substrate, wherein the substrate has no liquid absorbing property, wherein the jet head includes a nozzle from which the droplet is ejected, the nozzle being formed from a material that has a greater hardness than that of the fine particles in the solution, wherein the nozzle has a size that is equal to or less than Φ20 μm, the nozzle satisfying a relation of 0.0001≦Dp/Do≦0.01, where Dp represents the diameter of each of the fine particles and Do represents the diameter of the nozzle, wherein each of the fine particles has a size that is equal to or less than the roughness of a surface of the substrate.
A solution jet type fabrication apparatus for fabricating a wiring pattern or a device, the solution jet type fabrication apparatus comprising:
A solution used for a solution jet type fabrication apparatus for fabricating a wiring pattern or a device, the solution jet type fabrication apparatus having a jet head for ejecting a droplet onto a substrate, so as to form a pattern, by vaporizing a volatile ingredient of the solution, and allowing a solid component to remain on the substrate, the substrate having no liquid absorbing property, the jet head including a nozzle from which the droplet is ejected, the nozzle having a size that is equal to or less than Φ20 μm, the solution comprising:
A substrate used for a solution jet type fabrication apparatus for fabricating a wiring pattern or a device, the solution jet type fabrication apparatus having a jet head for ejecting a droplet of a solution containing fine particles onto a substrate, so as to form a pattern, by vaporizing a volatile ingredient of the solution, and allowing a solid component to remain on the substrate, the jet head including a nozzle from which the droplet is ejected, the nozzle being formed from a material that has a greater hardness than that of the fine particles in the solution, the nozzle having a size that is equal to or less than Φ20 μm, the nozzle satisfying a relation of 0.0001≦Dp/Do≦0.01, where Dp represents the diameter of each of the fine particles and Do represents the diameter of the nozzle, the substrate comprising:
A substrate used for a solution jet type fabrication apparatus for fabricating a wiring pattern or a device, the solution jet type fabrication apparatus having a jet head for ejecting a droplet of a solution containing fine particles onto a substrate, so as to form a pattern, by vaporizing a volatile ingredient of the solution, and allowing a solid component to remain on the substrate, the jet head including a nozzle from which the droplet is ejected, the nozzle being formed from a material that has a greater hardness than that of the fine particles in the solution, the nozzle having a size that is equal to or less than Φ20 μm, the nozzle satisfying a relation of 0.00011≦Dp/Do≦0.01, where Dp represents the diameter of each of the fine particles and Do represents the diameter of the nozzle, the substrate comprising:
A method for fabricating a wiring pattern or a device, the method comprising the steps of:
Dependencies are inferred from the claim text.