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US 2004/0201647 A1Published application
Stitching of integrated circuit components
OwnerMark Jackson Pulver, Kia Silverbrookinventors
Life of this patent
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Abstract
An integrated circuit incorporating microelectromechanical systems (MEMS), having a total area greater than an area of at least one of the reticles used to manufacture it.
Claims15
An integrated circuit incorporating microelectromechanical systems (MEMS), having a total area greater than an area of at least one of the reticles used to manufacture it.
A method of manufacturing an integrated circuit incorporating MEMS, comprising laying out the integrated circuit using a plurality of overlapping reticles.
Dependencies are inferred from the claim text.