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US 2004/0201443 A1Published application
Actuator, actuator driving method, and actuator system
AssigneeOlympus Corporation
InventorShinji Kaneko
Life of this patent
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AssigneeOlympus Corporation
InventorShinji Kaneko
Estimating the term…
A potential difference is applied between a movable electrode disposed a facing surface of a movable member, which the facing surface confronts a substrate extended in a predetermined direction or a vibrating member supported on the substrate vibratably in the predetermined direction, and a counter electrode disposed on the substrate or the vibrating member so as to confront the movable electrode. The applied potential difference causes an electrostatic force to act such that an apparent friction between the vibrating member and the movable member is greater than an apparent friction between the substrate and the movable member when displacing the vibrating member in a desired direction relatively on the substrate by vibrating in the predetermined direction, and thereby the movable member is relatively moved in the desired direction on the substrate.
An actuator comprising:
An actuator comprising:
An actuator comprising:
A driving method of an actuator, the actuator including a movable electrode disposed on a movable member, and a counter electrode disposed at any one of a facing surface of a substrate having the facing surface confronting the movable member and a facing surface of a vibrating member having the facing surface confronting the movable electrode and vibrating in a predetermined direction, applying a voltage to the movable electrode and the counter electrode, thereby causing the movable member to move relatively on the substrate, the driving method comprising:
A driving method of an actuator, the actuator applying a controlled voltage to a movable electrode disposed on a movable member, a first counter electrode disposed at a facing surface of the substrate having the facing surface confronting the movable electrode, and a second counter electrode disposed at a facing surface of the vibrating member having the facing surface confronting the movable electrode and vibrating in a predetermined direction, thereby causing the movable member to move relatively on the substrate, the driving method comprising:
Dependencies are inferred from the claim text.