Mesoscale mems switch apparatus and method
AssigneeMotorola, Inc.
InventorsJunhua Liu, William Olson
Life of this patent
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Abstract
A plurality of mesoscale MEMS switches each share a common control voltage potential electrode (such as ground). So configured, a large number of switches can be provided without incurring a significant increase in required actuation voltage. Such switches can be inter-coupled in a variety of ways. In addition, in one embodiment, stacked switches can be provided. If desired, such stacked switches can share a common movable conductive switch element.
Claims25
A mesoscale MEMS switch apparatus comprising a least a first and second mesoscale MEMS switch, wherein both the first and second mesoscale MEMS switch each includes a first and second control voltage potential electrode, and further comprising coupled electrodes comprising at least one of the first and second control voltage potential electrodes for the first mesoscale MEMS switch that is electrically coupled to a similar corresponding electrode of the second mesoscale MEMS switch, and further comprising at least a third mesoscale MEMS switch, wherein the third mesoscale MEMS switch includes a first and second control voltage potential electrode, and wherein a similar corresponding one of the first and second control voltage potential electrode for the third mesoscale MEMS switch is electrically coupled to the coupled electrodes.
(Cancelled)
A method comprising:
- providing a first mesoscale MEMS switch having first and second control voltage potential electrodes;
- providing a second mesoscale MEMS switch having first and second control voltage potential electrodes;
- providing a third mesoscale MEMS switch having first and second control voltage potential electrodes, wherein at least one of the following arrangements is provided:
- the first control voltage potential electrode of the first mesoscale MEMS switch is electrically coupled to the first control voltage potential electrode of the second mesoscale MEMS switch;
- the second control voltage potential electrode of the first mesoscale MEMS switch is electrically coupled to the second control voltage potential electrode of the second mesoscale MEMS switch.
(Cancelled)
The method of claim 44 13 wherein providing a third mesoscale MEMS switch includes providing the third mesoscale MEMS switch on a plane that is substantially non-co-planar with the first and second mesoscale MEMS switches.
The method of claim 44 13 wherein providing a first and second mesoscale MEMS switch includes disposing the first and second mesoscale MEMS switches substantially symmetrically about a conductive post.
An apparatus comprising:
- a first plurality of at least five mesoscale MEMS switches disposed substantially co-planar with respect to one another;
- a conductive surface that is electrically coupled to a control electrode of each of the plurality of mesoscale MEMS switches.
(Cancelled)
Dependencies are inferred from the claim text.