Alignment features in a probing device
AssigneeFormFactor, Inc.
InventorsTae Ma Kim, Bunsaku Nagai
Life of this patent
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Abstract
An image of an array of probes is searched for alignment features. The alignment features are then used to bring contact targets and the probes into contact with one another. The alignment features may be a feature of one or more of the tips of the probes. For example, such a feature may be a corner of one of the tips. An array of probes may be formed to have such alignment features.
Claims20
A method of probing an electronic device, said method comprising steps of:
- finding an alignment feature in an electronic image of a plurality of probes;
- and
- bringing contact targets on said electronic device into contact with tips of said probes, wherein said alignment feature comprises a portion of one of said tips.
A probing apparatus comprising:
- a substrate;
- and
- a plurality of probes disposed on said substrate, each of said probes comprising a contact tip,
- wherein each of a plurality of said contact tips are disposed on a surface of a structure such that a corner of said contact tip is distinguishable in an image of said probes.
A method of making an array of probes, said method comprising:
- determining a layout for a plurality of probes, each said probe disposed in said layout such that a tip of said probe corresponds to a contact target on an electronic device;
- identifying ones of said probes with space for an alignment feature;
- and
- making said plurality of probes, wherein at least one of said tips of said ones of said probes is disposed on a surface of a structure such that a corner of said at least one tip is distinguishable in an image of said probes.
An apparatus for probing an electronic device, said apparatus comprising:
- means for finding an alignment feature in an electronic image of a plurality of probes;
- and
- means for bringing contact targets on said electronic device into contact with tips of said probes,
- wherein said alignment feature comprises a portion of one of said tips.
A media for storing machine-executable instructions for causing a controller to perform a method comprising:
- finding an alignment feature in an electronic image of a plurality of probes;
- and
- generating control signals to bring contact targets on said electronic device into contact with tips of said probes,
- wherein said alignment feature comprises a portion of one of said tips.
A method of probing an electronic device, said method comprising steps of:
- finding a corner of an alignment feature in an electronic image of a plurality of probes;
- and
- bringing contact targets on said electronic device into contact with said probes.
Dependencies are inferred from the claim text.