Needle assembly of probe card

A needle assembly of a probe card, comprising:

• a needle guide plate as a thin plate made of silicon material, said needle guide plate being formed therein with needle movable holes having predetermined width and length and spaced from one another in a predetermined interval, said needle movable holes each being formed with an insulating film having a predetermined thickness on a circumferential surface thereof;
• needle plates, a surface of one side portion of each of the needle plates being adhered on one side surface of each of the needle holes, a surface of another side portion of each of the needle plates being spaced from a circumferential surface of each of the needle holes with a predetermined needle movable gap, the other portion of each of the needle plates being formed thinner in thickness than the needle guide plate in a vertical direction so as to be movable upward and downward within the needle movable hole;
• and
• a circuit substrate formed on the needle guide plate with a predetermined thickness, the circuit substrate formed therein with contact holes by which the circuit substrate is electrically connected to the needle plate, the circuit substrate formed thereon with connection patterns electrically connected to the contact holes,
• wherein said needle guide plate, said needle plate, and said circuit substrate are combined into one body.