Vacuum device having a getter
AssigneeHewlett-Packard Development Company, L.P.
InventorsSriram Ramamoorthi, Zhizhang Chen, John Liebeskind, Ronald L. Enck, Jennifer Shih
Life of this patent
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Abstract
A vacuum device, including a substrate and a support structure having a support perimeter, where the support structure is disposed over the substrate. In addition, the vacuum device also includes a non-evaporable getter layer having an exposed surface area. The non-evaporable getter layer is disposed over the support structure, and extends beyond the support perimeter, in at least one direction, of the support structure forming a vacuum gap between the substrate and the non-evaporable getter layer increasing the exposed surface area.
Claims51
A vacuum device, comprising:
- a substrate;
- a support structure having a support perimeter, said support structure disposed over said substrate;
- and
- a non-evaporable getter layer having an exposed surface area, said non-evaporable getter layer disposed over said support structure, and extending beyond said support perimeter in at least one direction of said support structure forming a vacuum gap between said substrate and said non-evaporable getter layer, increasing said exposed surface area.
A vacuum device, comprising:
- a substrate;
- means for supporting a non-evaporable getter layer over said substrate, said non-evaporable getter layer having an exposed surface and a substrate facing surface;
- and
- means for exposing said substrate facing surface to a vacuum.
A vacuum device, comprising:
- a substrate;
- a support structure disposed over said substrate, said support structure having a support surface area;
- a non-evaporable getter (NEG) layer, having a top surface area and a substrate facing surface area;
- and
- an effective surface area for pumping substantially equal to said top surface area of said NEG layer plus said substrate facing surface area minus said support surface area.
A vacuum device, comprising:
- a substrate;
- a first support structure having a support perimeter, said first support structure disposed over said substrate;
- a non-evaporable getter (NEG) layer having an exposed surface area, said NEG layer disposed over said first support structure;
- a second support structure having a second perimeter, said second support structure disposed over said NEG layer;
- and
- a second NEG layer having a second exposed surface area, said second NEG layer disposed over said second support structure, wherein said NEG layer extends beyond said support perimeter forming a vacuum gap between said NEG layer and said substrate, and said second NEG layer extends beyond said second perimeter forming a second vacuum gap between said NEG layer and said second NEG layer.
Dependencies are inferred from the claim text.