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AssigneeAsm Technology Singapore Pte Ltd
InventorsKa Shing Kenny Kwan, Srikanth Narasimalu, Murali Saranagapani, Sathish Kumar Balakrishnan
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A support structure supporting a movable component is provided with a vibration damper in the form of at least one cavity in the structure, the cavity being filled with a composite material; preferably a composite material of about 80% butyl rubber and 20% carbon particles. The composite material is preferably bonded to the cavity walls by adhesive or mechanically coupled by a texture on the cavity walls. The rubber composite may be first moulded then inserted into the cavity or may be injected into the cavity and moulded by the cavity. The cavities may be provided with a vent to facilitate insertion or injection of the composite material.
An apparatus comprising a support structure supporting a movable component, wherein the support structure has a vibration damper, the vibration damper being provided by at least one cavity in the support structure, the at least one cavity being at least partially filled with a composite material.
A method of damping vibrations in a support structure supporting a movable component, the method including the steps of providing the support structure with one or more cavities, and at least partially filling at least one of the cavities with a composite material.
Dependencies are inferred from the claim text.