Imager light shield
AssigneeMicron Technology, Inc.
InventorHoward E. Rhodes
Life of this patent
Estimating the term…
Abstract
An improved imager pixel arrangement having a light shield over the pixel circuitry, but below the conductive interconnect layers of the pixel. The light shield can be a thin film of opaque (or nearly-opaque) material with openings for contacts to the underlying circuitry. An aperture in the light shield exposes the active region of the pixel's photoconversion device.
Claims50
An imager device, comprising:
- a pixel photoconversion device;
- pixel circuitry in electrical communication with said pixel photoconversion device;
- a light shield layer, said light shield layer provided over said pixel circuitry and having a light transmission area over said photoconversion device;
- and
- at least one interconnect layer, all said interconnect layers being provided over said light shield layer.
An integrated circuit containing at least one CMOS pixel sensor cell, said pixel sensor cell comprising:
- a semiconductor substrate;
- a photosensor within said substrate;
- a transistor gate over said substrate for gating charges produced by said photosensor;
- a light-blocking film over said substrate and said transistor gate, but under all conductive interconnect layers of said integrated circuit, wherein said light-blocking film has an opening over said photosensor;
- and
- a first conductive interconnect layer over said light-blocking film.
An imager system, comprising:
- a processor;
- and
- an imaging device electrically coupled to said processor, said imaging device comprising a CMOS pixel array, at least one pixel of said array comprising:
- a pixel photoconversion device;
- pixel circuitry in electrical communication with said pixel photoconversion device;
- a light shield layer, said light shield layer provided over said pixel circuitry and having a light transmission area over said photoconversion device;
- and
- at least one interconnect layer, all said interconnect layers being provided over said light shield.
A CMOS imager pixel having pixel circuitry in electrical communication with a photoconversion device and electrically interconnected through at least one conductive interconnect layer, comprising:
- a light shield layer provided between said pixel circuitry and any conductive interconnect layers and having a light transmission area over said photoconversion device.
A CMOS imager device, comprising:
- a pixel array having a plurality of pixels, each of said pixels having pixel circuitry in electrical communication with a photoconversion device and a light shield provided between said pixel circuitry and any metal interconnect layers, said light shield having a light transmission area over said photoconversion device, wherein an electrical signal flow is generated by said pixel array in response to photo-input;
- a read-out circuit configured to receive said electrical signal flow from said pixel array;
- an analog-to-digital conversion device configured to receive said electrical signal flow from said read-out circuit;
- a processor configured to receive said electrical signal flow from said analog-to-digital device;
- and
- a serializer configured to receive said electrical signal flow from said processor.
A method of forming a pixel of an imager device, comprising:
- forming a photoconversion device in a substrate;
- forming a light shield over said substrate, said light shield being configured to allow light to pass to said photoconversion device;
- and
- forming at least one metal interconnect layer over said light shield, wherein all said formed metal interconnect layers are formed over said light shield.
A method of forming a CMOS imager pixel array, comprising:
- forming an array of CMOS pixels isolated from one another within and on a substrate, each of said CMOS pixels being formed by the acts of:
- forming a photodiode within said substrate;
- forming a first dielectric layer over said photodiode;
- forming a light shield layer over said dielectric layer;
- forming an aperture in said light shield layer above at least a portion of said photodiode;
- and
- forming a plurality of metal interconnect layers over said light shield.
Dependencies are inferred from the claim text.