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US 2004/0201050 A1Published application
Ferroelectric capacitor
AssigneeOki Semiconductor Co., Ltd.
InventorIchiro Koiwa
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Abstract
A ferroelectric capacitor includes a bottom electrode, a ferroelectric layer formed on the bottom electrode, and a top electrode formed on the ferroelectric layer. A plurality of projection electrodes are formed on the bottom electrode.
Claims19
A ferroelectric capacitor comprising:
- a bottom electrode;
- a plurality of projection electrodes formed on the bottom electrode;
- a ferroelectric layer formed on the bottom electrode and the projection electrodes;
- and
- a top electrode formed on the ferroelectric layer.
2 more elements
A ferroelectric capacitor comprising:
- a first electrode;
- a plurality of embedded electrodes which are embedded in the first electrode;
- a second electrode;
- and
- a ferroelectric layer which is sandwiched between the first electrode and the second electrode,
- wherein the embedded electrodes each include a surface exposed from the first electrode that is in contact with the ferroelectric layer.
3 more elements
A ferroelectric capacitor comprising:
- a first electrode which has a rough surface;
- a second electrode;
- and
- a ferroelectric layer which is sandwiched between the rough surface of the first electrode and the second electrode;
1 more element
A ferroelectric capacitor comprising:
- a first electrode;
- a second electrode;
- a ferroelectric layer which is sandwiched between the first electrode and the second electrode;
- and
- a plurality of third electrodes formed between the first electrode and the second electrode, wherein the third electrodes generate polarization.
2 more elements
Dependencies are inferred from the claim text.