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AssigneeKLA-Tencor Technologies Corporation
InventorsMarian Mankos, David A. Soltz, Harald F. Hess
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One embodiment disclosed relates to a method for inspecting or reviewing a magnetized specimen using an automated inspection apparatus. The method includes generating a beam of incident electrons using an electron source, biasing the specimen with respect to the electron source such that the incident electrons decelerate as a surface of the specimen is approached, and illuminating a portion of the specimen at a tilt with the beam of incident electrons. The specimen is moved under the incident beam of electrons using a movable stage of the inspection apparatus. Scattered electrons are detected to form image data of the specimen showing distinct contrast between regions of different magnetization. The movement of the specimen under the beam of incident electrons may be continuous, and data for multiple image pixels may be acquired in parallel using a time delay integrating detector.
1-22. (canceled)
A process for inspecting or reviewing manufactured magnetic specimens, the process comprising:
An apparatus for inspecting or reviewing manufactured magnetic specimens, the apparatus comprising:
An e-beam tool for inspecting or reviewing manufactured magnetic. specimens, the tool comprising:
Dependencies are inferred from the claim text.