Method and structure for a slug assisted pusher-mode piezoelectrically actuated liquid metal optical switch

A structure for an optical switch, comprising:

• a piezoelectric substrate layer;
• an actuator fluid reservoir layer coupled to the piezoelectric substrate layer, said actuator fluid reservoir layer further comprising a plurality of piezoelectrically actuated pusher elements;
• a chamber layer coupled to the actuator fluid reservoir layer, said chamber layer comprising a plurality of membranes coupled to the plurality of piezoelectrically actuated pusher elements;
• a via layer coupled to the chamber layer, wherein said via layer comprises a plurality of vias;
• a liquid metal channel layer coupled to the via layer, said liquid metal channel layer coupled to a plurality of optical waveguides;
• and
• an actuator liquid-filled chamber housed within the liquid metal channel layer, wherein the actuator liquid-filled chamber comprises one or more globules of liquid metal coupled to a plurality of seal belts and a slug coupled to one or more of the one or more globules of liquid metal and coupled to one or more of the one or more seal belts, wherein said actuator liquid-filled chamber is coupled to the one or more membranes.

A method for switching of one or more optical signals using a liquid metal switch, comprising:

• actuating one or more piezoelectric elements;
• deflecting one or more corresponding membrane elements by the actuation of the one or more piezoelectric elements;
• changing a pressure of actuator liquid by the deflection of the one or more membrane elements;
• and
• the change in pressure of the actuator liquid breaking a liquid metal connection between a first contact and a second contact of the liquid metal switch, moving a slug coupled to the first contact and coupled to the second contact, thereby blocking or unblocking one or more of a plurality of optical waveguides.