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US 2004/0200706 A1Published application
Substrate with liquid electrode
AssigneeAgilent Technologies, Inc.
InventorsLewis R. Dove, Marvin Glenn Wong, Mitsuchika Saito
Life of this patent
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Abstract
A substrate, a method for producing a substrate, and a switch incorporating a substrate are disclosed. In one embodiment, the substrate has a first layer, a first electrode deposited on the first layer, and a second layer mated to the first layer. The second layer defines a duct leading from the first electrode to a surface of the second layer opposite the first electrode. A liquid electrode fills at least a portion of the duct.
Claims26
A substrate comprising:
- a first layer;
- a first electrode deposited on the first layer;
- a second layer mated to the first layer, the second layer defining a duct leading from the first electrode to a surface of the second layer that is opposite the first electrode;
- and
- a liquid electrode filling at least a portion of the duct.
2 more elements
A substrate produced by:
- depositing a first electrode on a first layer;
- depositing a liquid electrode on the first electrode;
- aligning a duct in a second layer with the first electrode on the first layer;
- and
- mating the second layer to the first layer, forcing the liquid electrode through the duct.
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A switch comprising:
- a first substrate having a first layer and a second layer, the first layer having a plurality of electrodes deposited thereon, and the second layer defining a number of ducts;
- a second substrate mated to the first substrate, the first substrate and the second substrate defining therebetween at least portions of a number of cavities, each duct of the second layer leading from at least one of the cavities to one of the plurality of electrodes deposited on the first layer;
- a switching fluid, held within one or more of the ducts and one or more of the cavities, at least a portion of which is movable to open and close at least a pair of the plurality of electrodes in response to forces that are applied to the switching fluid;
- and
- an actuating fluid, held within one or more of the cavities, that applies the forces to the switching fluid.
2 more elements
Dependencies are inferred from the claim text.