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AssigneeInternational Business Machines Corporation
InventorsAlexander Bietsch, Emmanuel Delamarche, Bruno Michel, Heinz Schmid, Matthias Geisler
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A wet etching system for selectively patterning substrates having regions covered with self-assembled monolayers (SAM) thereby controlling the etch profile. The system contains a) a liquid etching solution; and b) at least one additive to the liquid etching solution having a higher affinity to the regions of the substrate covered with the SAMs than to the other regions of the substrate. Also provided is a method of selectively patterning substrates having regions covered with self-assembled monolayers (SAMs), thereby controlling the etch profile, the method consisting of the steps of a) providing a liquid etching solution; b) adding at least one additive to said etching solution having a higher affinity to the regions of the substrate covered with the SAMs than to the other regions of the substrate; and c) etching said substrate with said liquid etching solution containing at least one additive.
A wet etching system for selectively patterning substrates having regions covered with self-assembled monolayers (SAMs), thereby controlling the etch profile, said system comprising
The system of any one of the preceding claims, characterized in that it additionally comprises a second additive.
The system of any one of the preceding claims, characterized in that said substrate is selected from the group consisting of Au, Ag, Pd and Cu.
A method for selectively patterning a substrate having regions covered with self-assembled monolayers (SAMs), thereby controlling the etch profile, said method comprising the steps of
A method of etching a copper substrate having regions covered with self-assembled monolayers (SAMs) with a wet etching system, characterized in that said wet etching system comprises a first compound being adapted to bind to said copper substrate and to oxidize said copper, and a second compound being adapted to solubilize said oxidized copper.
Dependencies are inferred from the claim text.