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US 2004/0200419 A1Published application
Explosion welded design for cooling components
AssigneeAdvanced Energy Industries, Inc.
InventorsJustin Mauck, Steve Dillon
Life of this patent
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Abstract
A method and apparatus are described for making a coldplate. A first component of, for example copper, is explosion welded to a second component of, for example aluminum. The first metal component has a top surface opposite the second metal component and at least one channel proximate the top surface adapted to carry a cooling fluid. The coldplate can be used as an interior wall for a plasma chamber.
Claims20
A method of making a coldplate comprising:
- explosion welding a first component to a second component, the first component having a top surface opposite the second metal component;
- and
- creating at least one channel in the first metal component proximate the top surface, the channel being adapted to carry a cooling fluid.
A coldplate, comprising:
- a second component;
- and
- a first component that is explosion welded onto the second component, the first component having a channel therein for carrying cooling fluid.
A vacuum chamber comprising;
- a plurality of sides defining an interior of the vacuum chamber;
- a second component having a top surface and a bottom surface, the bottom surface forming at least one of the plurality of sides of the vacuum chamber;
- a first component explosion welded to the top surface of the second component;
- and
- a channel in the first component to carry a cooling fluid.
2 more elements
Dependencies are inferred from the claim text.