Effusion cell with improved temperature control of the crucible
OwnerHeiko Schuler, Karl Eberl +1inventors
InventorsHeiko Schuler, Karl Eberl, Frank Huber
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Abstract
The temperature coupling of crucible (4) of an effusion cell to a receiving part (1) that surrounds the crucible (4) and serves as a heating-equipped cooling reservoir is improved by inserting, in the space (2) between the crucible (4) and the wall of a recess (1A) in the receiving part (1), a conducting medium with high heat conductivity and low vapor pressure (e.g. Ga, In, Hg or a soft solid). As a result of the improved thermal coupling of crucible (4), the temperature of the crucible (4) follows more rapidly that of the heating-equipped cooling reservoir, such that materials with high vapor pressure and relatively low evaporation temperatures can be deposited under greater control.
Claims12
Effusion cell for a vapor deposition method, with
- a crucible (4) for a substance to be evaporated (7),
- a receiving part designed as a heating-equipped cooling reservoir (1) with a recess (1A) for receiving the crucible (4), where
- a space (2) between the recess (1A) and the crucible (4) is filled at least in part with a gas, a liquid or a plastically deformable solid object as a heat-conducting medium.
Effusion cell as per one of the preceding claims, characterized in that
- the receiving part (1) is designed as a material block (1).
Effusion cell as per one of the preceding claims, characterized in that
- the receiving part (1) is made of metal or a ceramic.
Effusion cell as per one of the preceding claims, characterized in that
- the recess (1A) and the crucible (4) are shaped as essentially congruent to each other.
Effusion cell as per one of the preceding claims, characterized in that
- the recess (1A) and the crucible (4) are shaped as essentially non-congruent to each other.
Effusion cell as per one of the preceding claims, characterized in that
- the crucible (4) has a surrounding collar (4A), which lies on top of an edge section of the recess (1A).
Effusion cell as per one of the preceding claims, characterized in that
- the space (2) contains Ga, In, Hg or is filled with a substance that has a vapor pressure of an order of magnitude that is comparable to or lower than that of Ga, In or Hg under vacuum to ultrahigh vacuum conditions.
Effusion cell as per one of the preceding claims, characterized in that
- a temperature sensor (6), especially a thermoelement (6), is embedded in the receiving part (1).
Vapor deposition method with an effusion cell which has
- a crucible (4) for receiving a substance to be evaporated (7), and
- a receiving part (1) designed as a heating-equipped cooling reservoir, especially a material block (1), with a recess (1A) for receiving the crucible (4), where
- a space between the receiving part (1) and the crucible (4) is filled at least in part with a gas, a liquid or a plastically deformable solid acting as a heat-conducting medium.
Dependencies are inferred from the claim text.