High pressure sensor comprising silicon membrane and solder layer
AssigneeRobert Bosch GmbH
InventorMartin Mast
Life of this patent
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Abstract
A device for measuring pressure, e.g., for measuring high pressure, including a pressure transducer that is arranged in a housing and includes sensor elements and a sensor diaphragm on a first side, and on a second side opposite the first side is provided with a cutout that extends from the second side to the sensor diaphragm. The pressure transducer is formed as a semiconductor pressure transducer and, with an edge area of the second side surrounding the cutout, is directly soldered onto a support part, provided with a first pressure-channel section, with the aid of a solder layer in such a manner that the first pressure-channel section and the cutout are interconnected.
Claims16
1-14 (Canceled)
A device for measuring pressure, comprising:
- a pressure transducer arranged in a housing, a first side of the pressure transducer including sensor elements and a sensor diaphragm, a second side of the pressure transducer, opposite the first side, having a cutout that extends from the second side up to the sensor diaphragm;
- wherein the pressure transducer is a semiconductor pressure transducer and, via an edge area of the second side surrounding the cutout, is soldered directly onto a support part, the support part including a first pressure-channel section, via a solder layer such that the first pressure-channel section and the cutout are interconnected.
Dependencies are inferred from the claim text.