Method for manufacturing surface acoustic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorsOsamu Nakagawara, Akinori Shinoda
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Abstract
A piezoelectric substrate is provided with interdigital transducer electrodes including a first electrode layer, a second electrode layer, and a third electrode layer that is principally made of aluminum. The piezoelectric substrate has a stepped structure on the surface of the piezoelectric substrate, the stepped structure including terraces each having a width of about 50 nm or less and steps each having a width of a mono-molecular layer (e.g., about 14 Å).
Claims15
A method for manufacturing a surface acoustic wave device that has main electrodes formed on a base electrode on a piezoelectric substrate, the method comprising:
- a step of forming a stepped structure on a surface of the piezoelectric substrate, the stepped structure including terraces each having a width of about 50 nm or less and steps each having a width of a mono-molecular layer;
- a step of forming a first electrode layer and a second electrode layer for forming the base electrode, the first electrode layer and the second electrode layer improving the crystallinity of the main electrodes;
- and
- a step of forming a third electrode layer for forming the main electrodes on the second electrode layer, the third electrode layer being principally composed of aluminum.
Dependencies are inferred from the claim text.