Optical cube
AssigneeASML US, Inc.
InventorsSamad M. Edlou, David H. Peterson
Life of this patent
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Abstract
A cube used to perform optical functions in a system, such as beam splitting or polarizing, or both, is manufactured by optically contacting a coated prism with an uncoated prism. The coated prism includes a dielectric stack having alternating layers of high and low index of refraction materials. To ensure secure optical contacting between the coated prism and uncoated prism, low interface reflection, and good throughput, a contacting layer is deposited on the dielectric stack. The contacting layer can be fused silica or SiO2, which has natural compatibility with the CaF2 materials that make up the uncoated prism and the coating layers.
Claims11
A cube comprising:
- an uncoated prism;
- a coated prism coupled to said uncoated prism, the coated prism including,
- a first coating section having a multi-layered coating, and
- a second coating section formed on top of said first coating section, said second coating section having a contact layer coating.
An optical device comprising:
- an uncoated optical element;
- a coated optical element coupled to a surface of said uncoated optical element, the coated optical element including,
- a multi-layered coating formed on said surface, and
- a contact layer coating formed on said multi-layered coating.
Dependencies are inferred from the claim text.