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US 2004/0177331 A1Published application
Self-diagnostic circuit of I/O circuit system
AssigneeTokyo Electron Limited
InventorKosuke Urakawa
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AssigneeTokyo Electron Limited
InventorKosuke Urakawa
Estimating the term…
An I/O circuit system incorporated in the main controller of a semiconductor manufacturing apparatus or the like includes a self-diagnostic circuit in which tie switches are interposed between output channels which output control signals in order to drive and control apparatus-side driving portions constructed on an I/O board, and input channels which input return signals and sensor signals in response to the control signals, and self-diagnostic switches which disconnect power supply lines to the apparatus-side driving portions are arranged. To perform self-diagnosis upon generation of a fault or the like, the self-diagnostic switches are in a nonconductive state, and the tie switches are in a conductive state to electrically disconnect the apparatus. If a return signal corresponding to a self-diagnostic signal output from the main controller is returned, no electrical fault is determined to occur. If no return signal is returned, an electrical fault is determined to have occurred.
A self-diagnostic circuit for an I/O circuit system comprising
A self-diagnostic circuit for an I/O circuit system comprising a plurality of output analog channels which individually send control signals from a main controller to loads serving as objects to be controlled, and a plurality of input analog channels which input analog signals from the objects to be controlled to the main controller,
A self-diagnostic circuit for an I/O circuit system comprising a main controller, a transmitter/receiver which is connected to the main controller and has a transmission function and a reception function, a transmission digital channel which is connected to the transmitter/receiver and outputs transmission data, a reception digital channel which inputs externally received reception data to the transmitter/receiver, and an interface which interfaces the transmission data and the reception data,
A self-diagnostic circuit mounted in an I/O circuit system which is incorporated in a main controller that controls and drives an apparatus having a plurality of driving portions, and which has plurality of output and input channels that exchange driving/control signals to the apparatus and return signals, comprising:
A self-diagnostic circuit mounted in an I/O circuit system which is incorporated in a main controller that controls and drives an apparatus having a plurality of driving portions, and which has plurality of output and input channels, comprising:
Dependencies are inferred from the claim text.