Apparatus for testing semiconductor integrated circuit

An apparatus for testing a semiconductor integrated circuit comprising:

• a test circuit board for exchanging signals with a semiconductor integrated circuit under test;
• and
• an ancillary test device which is disposed in the vicinity of the test circuit board and connected to the test circuit board;
• wherein the ancillary test device comprises digital circuit testing capability for testing a digital circuit included in the semiconductor integrated circuit under test;
• the ancillary test device comprises test pattern memory for storing a plurality of test pattern data sets corresponding to a plurality of test items for testing the digital circuit, a test pattern signal generator into which are written test pattern data selected from a plurality of test pattern data sets stored in the test pattern memory, and a control section for controlling an operation for the test pattern data selected from among the plurality of test pattern data sets stored in the test pattern memory, an operation for writing the selected test pattern data into the test pattern signal generator, and an operation for reading test pattern data from the test pattern signal generator:
• the ancillary test device generates a test input pattern signal for the semiconductor integrated circuit under test on the basis of test pattern data read from the test pattern signal generator and determines a test output pattern signal output from the semiconductor integrated circuit under test on the basis of the test input pattern signal, thereby testing a digital circuit of the semiconductor integrated circuit under test;
• the ancillary test device is formed from a plurality of circuit boards including a circuit board to which a storage medium is removably attached;
• and
• the pattern data memory is formed from the storage medium.

An apparatus for testing a semiconductor integrated circuit comprising:

• a test circuit board for exchanging signals with a semiconductor integrated circuit under test;
• and
• an ancillary test device which is disposed in the vicinity of the test circuit board and connected to the test circuit board;
• wherein the ancillary test device comprises digital circuit testing capability for testing a digital circuit included in the semiconductor integrated circuit under test;
• the ancillary test device comprises test pattern memory for storing a plurality of test pattern data sets corresponding to a plurality of test items for testing the digital circuit, a test pattern signal generator having first and second memory devices into which are written test pattern data selected from a plurality of test pattern data sets stored in the test pattern memory, and a control section for controlling an operation for the test pattern data selected from among the plurality of test pattern data sets stored in the test pattern memory, an operation for writing the selected test pattern data into the first and second memory devices of the test pattern signal generator, and an operation for reading test pattern data from the first and second memory devices of the test pattern signal generator;
• the ancillary test device generates a test input pattern signal for the semiconductor integrated circuit under test on the basis of test pattern data read from the test pattern signal generator and determines a test output pattern signal output from the semiconductor integrated circuit under test on the basis of the test input pattern signal, thereby testing a digital circuit of the semiconductor integrated circuit under test;
• and
• when first test pattern data written into the first memory of the test pattern signal generator are read, second test pattern data selected from the plurality of test pattern data sets stored in the test pattern memory are written into the second memory device.

A method of manufacturing a semiconductor integrated circuit comprising the step of testing the semiconductor integrated circuit;

• wherein
• a test circuit board for exchanging signals with a semiconductor integrated circuit under test, and an ancillary test device which is disposed in the vicinity of the test circuit board and connected to the test circuit board are used in the step of testing the semiconductor integrated circuit;
• the ancillary test device comprises digital circuit testing capability for testing a digital circuit included in the semiconductor integrated circuit under test;
• the ancillary test device comprises test pattern memory for storing a plurality of test pattern data sets corresponding to a plurality of test items for testing the digital circuit, a test pattern signal generator into which are written test pattern data selected from a plurality of test pattern data sets stored in the test pattern memory, and a control section for controlling an operation for the test pattern data selected from among the plurality of test pattern data sets stored in the test pattern memory and an operation for writing the selected test pattern data into the test pattern signal generator;
• and
• the ancillary test device generates a test input pattern signal for the semiconductor integrated circuit under test on the basis of test pattern data written in the test pattern signal generator and determines a test output pattern signal output from the semiconductor integrated circuit under test on the basis of the test input pattern signal, thereby testing a digital circuit of the semiconductor integrated circuit under test, in the step of testing the semiconductor integrated circuit.