Back to results
US 2004/0176015 A1Published application
Method of determining the endpoint of a planarization process
AssigneeInfineon Technologies Aktientgesellschaft
InventorsPeter Lahnor, Olaf Kuehn, Andreas Roemer, Alexander Simpson
Life of this patent
Estimating the term…
Abstract
A method of determining the endpoint of a planarizing process is disclosed. An endpoint detection signal is selectively sampled from at least one predetermined location within a planarizing region defined on a planarizing web. Planarization is stopped when the endpoint criterion based on the endpoint detection signal is detected.
Claims20
A method of determining an endpoint of a planarizing process comprising:
- stopping planarizing of a substrate if an endpoint criterion based on the endpoint detection signal is detected.
An apparatus for planarizing a substrate comprising:
- a control unit for stopping planarizing of a substrate if an endpoint criterion based on endpoint detection signal samples is detected.
Dependencies are inferred from the claim text.