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AssigneeCree Lighting Company
InventorsShuji Nakamura, Steven DenBaars, Max Batres, Michael Coulter
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The present invention discloses a susceptor mounting assembly for holding semiconductor wafers in an MOCVD reactor during growth of epitaxial layers on the wafers, that is particularly adapted for mounting a susceptor in an inverted type reactor chamber. It includes a tower having an upper and lower end with the upper end mounted to the top inside surface of the reactor chamber and a susceptor is arranged at the tower's lower end. Semiconductor wafers are held adjacent to the susceptor such that heat from the susceptor passes into wafers. A second embodiment of a susceptor mounting assembly according to the invention also comprises a tower having an upper and lower end. The tower's upper end is mounted to the top inside surface of the reactor chamber. A susceptor is housed within a cup and the cup is mounted to the tower's lower end.
An apparatus for holding semiconductor wafers in an inverted-type semiconductor growth reactor chamber for growth of semiconductor materials on the wafers, comprising:
A reactor for growing epitaxial layers on semiconductor wafers, comprising:
Dependencies are inferred from the claim text.