Method for lithographic processing on molecular monolayer and multilayer thin films
AssigneeCalifornia Institute of Technology
InventorsJames R. Heath, Charles P. Collier, Yi Luo, Erica DeIonno, Patricia A. Beck
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Abstract
Methods for making electronic devices where a molecular monolayer or multilayer is sandwiched between top and bottom electrodes at electrode intersections. The molecular layer has an electrical characteristic such as bistable switching. A layer of electrically conductive material is used to protect the molecular layer during formation of the top electrode pattern. The electrically conductive material remains sandwiched between the top and bottom electrodes at the electrode intersections in the final electronic device.
Claims24
A method for making a molecular electronic device comprising the steps of:
- providing a substrate comprising a surface on which is located a first electrode pattern;
- depositing molecules having an electrical characteristic onto said substrate surface to form a molecular layer which covers said substrate surface including said first electrode pattern;
- depositing an electrically conductive material onto said molecular switching layer to form an electrically conductive protective layer having an exposed surface;
- forming a second electrode pattern on the exposed surface of said protective layer wherein said second electrode pattern overlaps said first electrode pattern to form at least one electrode intersection;
- and
- removing said protective layer at locations which remain exposed after formation of said second electrode pattern to form at least one electrode intersection wherein said molecular layer and electrically conductive protective layer are sandwiched between said first and second electrodes.
3 A method for making a molecular electronic device according to claim 1 wherein said step of forming said second electrode pattern on the exposed surface of said electrically conductive protective layer comprises the steps of:
- forming a mask layer covering said electrically conductive protective layer;
- removing a sufficient portion of said mask layer to form an electrode location on said electrically conductive protective layer;
- and
- depositing electrode material onto said electrode location to form said second electrode pattern on said protective layer.
An assembly for use in making a molecular electronic device, said assembly comprising:
- a substrate comprising a surface on which is located a first electrode pattern;
- a layer of molecules having an electrical characteristic which has been deposited onto said substrate surface to form a molecular layer which covers said substrate surface including said first electrode pattern;
- a layer of electrically conductive material which has been deposited onto said molecular layer to form an electrically conductive protective layer having an exposed surface on which a second electrode pattern may be formed.
A molecular electronic device or circuit comprising:
- a. a substrate comprising a surface on which is located a first electrode pattern having an interior surface;
- b. a second electrode pattern having an interior surface wherein said second electrode pattern overlaps said first electrode pattern to form at least one electrode intersection located between the interior surfaces of said first and second electrode patterns;
- c. a layer of electrically conductive protective material located on the interior surface of said second electrode pattern;
- and
- d. a layer of molecules having an electrical characteristic located adjacent to said layer of electrically conductive material wherein said one or more electrode intersections comprise said molecules and said electrically conductive protective material sandwiched between said first and second electrode patterns.
Dependencies are inferred from the claim text.