System and method for heating solid or vapor source vessels and flow paths
AssigneeMKS Instruments, Inc.
InventorRichard C. Groom
Life of this patent
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Abstract
A system for heating a flow path including at least a solid or vapor source vessel connected by a conduit to a valve. The system includes at least one tubular adapter of heat conductive material for receipt along at least a portion of the flow path. The adapter has inner dimensions substantially corresponding to outer dimensions of the portion of the flow path and an outer dimension which is substantially constant along a length of the adapter. The system also includes at least one tubular heater apparatus received over the adapter and having an inner dimension that is substantially constant along a length of the heater apparatus and substantial corresponds to the outer dimension of the adapter.
Claims25
A system for heating a flow path including at least a solid or vapor source vessel connected by a conduit to a valve, comprising:
- at least one tubular adapter comprising heat conductive material for receipt along at least a portion of the flow path, the adapter having inner dimensions substantially corresponding to outer dimensions of the portion of the flow path and an outer dimension which is substantially constant along a length of the adapter;
- and
- at least one tubular heater apparatus received over the adapter and having an inner dimension which is substantially constant along a length of the heater apparatus and substantial corresponds to the outer dimension of the adapter.
Dependencies are inferred from the claim text.