Reflecting device for electromagnetic waves
AssigneeCarl Zeiss SMT GmbH
InventorsMartin Weiser, Udo Dinger, Siegfried Stacklies, Markus Haidl
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Abstract
A device serves for reflecting electromagnetic waves in a length range less than 200 nm. It has a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier. An intermediate layer made of a material which is formed such that its surface roughness is not significantly increased after beam processing methods is fitted between the mirror carrier and the reflective layer.
Claims19
A reflecting device for electromagnetic waves, comprising a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier, wherein an intermediate layer made of a material which is formed such that its surface roughness is not significantly increased after beam processing methods is fitted between the mirror carrier and the reflective layer.
A method for producing a device for reflecting electromagnetic waves, comprising a mirror carrier made of a material with at least approximately vanishing thermal expansion and at least one reflective layer applied on said mirror carrier, wherein in a first step, the mirror carrier is superpolished to surface roughnesses in the spatial frequency range less than/equal to 1 μm−1 less than/ equal to 0.25 nm rms;
- in a second step, an intermediate layer is applied to the superpolished mirror carrier, in a third step, a correction of the surface form of the mirror carrier is carried out by means of beam processing methods and, in a fourth step, the reflective layer is applied to the mirror carrier.
Dependencies are inferred from the claim text.