US 2004/0174524 A1 · Accurate small-spot spectrometry systems and methods

Abstract

The invention is a method and apparatus for determining characteristics of a sample. The system and method provide for detecting a monitor beam reflected off a mirror, where the monitor beam corresponds to the intensity of light incident upon the sample. The system and method also provide for detecting a measurement beam, where the measurement beam has been reflected off the sample being characterized. Both the monitor beam and the measurement beam are transmitted through the same transmission path, and detected by the same detector. Thus, potential sources of variations between the monitor beam and the measurement beam which are not due to the characteristics of the sample are minimized. Reflectivity information for the sample can be determined by comparing data corresponding to the measurement beam relative to data corresponding the monitor beam.

Claims16

Dependent claims

A system for measuring characteristics of a sample, comprising:

a light source for generating a beam of light;
a mirror movable between a first position and a second position, the first position located between the light source and the sample such that light generated by the light source is reflected off the mirror and transmitted through a reflection path, the second position allowing light generated by the light source to be reflected off the sample and transmitted through the reflection path;
and
a spectrometer positioned along the reflection path for selectively receiving light reflected from one of the mirror and the sample and generating signals corresponding to an intensity of the reflected light at different wavelengths.

1 more element

Dependencies are inferred from the claim text.

Accurate small-spot spectrometry systems and methods

Life of this patent

Accurate small-spot spectrometry systems and methods

Life of this patent

Abstract

Claims16