Fabrication of devices with fibers engaged to grooves on substrates
AssigneeOluma, Inc.
InventorsVilas Koinkar, Timothy C. Collins, Joannes M. Costa, Joseph A. Levert
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Abstract
Fabrication techniques for polishing fibers engaged in grooves on substrates. A protection template assembly is disclosed to protect the unpolished portions of fibers. Chemical mechanical polishing may be used to achieve high fabrication throughput and high polishing uniformity. Optical monitoring may be used to monitor the polishing in real time.
Claims7
A device, comprising a template plate having a central opening to expose an array of fibers fixed on a substrate and a peripheral region around said central opening, wherein two opposing sides of said peripheral region across said central opening have parallel grooves for receiving the array of fibers.
Dependencies are inferred from the claim text.