Feed-through manufacturing method and feed-through
OwnerMitsuhiro Yuasainventor
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Abstract
A method of producing a feedthrough having a plurality of through conductive parts formed in a substrate is provided. This method includes the steps of: forming a stopper film on one surface of the substrate; forming a plurality of holes that reach the stopper film by etching the substrate; forming a plurality of conductive parts in the plurality of holes; removing the stopper film by etching; and making the top ends of the plurality of conductive parts protrude from the substrate by etching the surface of the substrate from which the stopper film has been removed.
Claims8
A method of producing a feedthrough having a plurality of through conductive parts in a substrate,
- the method comprising the steps of:
- forming a stopper film on one surface of the substrate;
- forming a plurality of holes that reach the stopper film by etching the substrate;
- forming a plurality of conductive parts in the plurality of holes;
- removing the stopper film by etching;
- and
- making the top ends of the plurality of conductive parts protrude from the substrate by etching the surface of the substrate from which the stopper film has been removed, claim 1 being claimed.
Dependencies are inferred from the claim text.