Method and apparatus for separating composite member using fluid
AssigneeCanon Kabushiki Kaisha
InventorsKazuaki Ohmi, Takao Yonehara, Kiyofumi Sakaguchi, Kazutaka Yanagita
Life of this patent
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Abstract
To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.
Claims41
A method of separating a composite member having a plurality of members as mutually bonded, at a position different from the bonding position of the plurality of members, comprising jetting a fluid against a side surface of the composite member to separate the composite member.
A method of producing a semiconductor substrate comprising the steps of:
- preparing on a substrate a first substrate having a porous single crystal semiconductor layer and a nonporous single crystal semiconductor layer provided on the porous single crystal semiconductor layer;
- bonding the first substrate to a second substrate to form a composite member;
- and
- jetting a fluid to the vicinity of the porous single crystal semiconductor layer of the composite member to separate the composite member at the porous single crystal semiconductor layer.
A method of producing a semiconductor substrate comprising the steps of:
- implanting ions into a first substrate comprising a single crystal semiconductor at a predetermined depth to form an ion-implanted layer such that a microcavity layer can be obtained;
- bonding the first substrate and a second substrate to each other via an insulating layer therebetween to form a composite member;
- and
- jetting a fluid against the vicinity of the ion-implanted layer of the composite member to separate the composite member at the ion-implanted layer.
A separation method comprising the steps of:
- rotatably holding a first surface of a composite member having a plurality of members as mutually bonded by using a first holder;
- rotatably holding a second surface of the disc-like composite member by using a second holder;
- rotating the first and second holders in synchronism;
- jetting a fluid against the end surface of the composite member, which is rotating;
- and
- separating the composite member into a plurality of members using as a starting point the portion on which the fluid has been jetted.
A separation apparatus comprising a first holder for rotatably holding a first surface of a disc-like composite member having a plurality of members as bonded mutually;
- a second holder for rotatably holding a second surface of the disc-like composite member;
- synchronizing means for allowing the first and second holders during rotation to synchronize mutually;
- and a nozzle that jets a fluid against the end surface of the composite member, which is rotating, in order to separate the composite member into a plurality of members using as a starting point the position on which the fluid has been jetted.
A method of separating a composite member having a plurality of members, at a region including cavities or pores, comprising jetting a fluid consisting essentially of an abrasive particle-free liquid against a side surface of the composite member to separate the composite member.
Dependencies are inferred from the claim text.