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US 2004/0170928 A1Published application
Patterning methods and systems using reflected interference patterns
AssigneeUniversity of Tennessee Research Foundation
InventorsDaniel J. C. Herr, David Charles Joy
Life of this patent
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Abstract
A method for patterning a layer on a substrate can include projecting coherent radiation toward a reflector surface so that the coherent radiation is reflected off the reflector surface to provide a holographic projection of a desired image wherein the reflector surface includes information that corresponds to an inverse of the holographic projection of the desired image. The substrate including the layer can be maintained in the path of the reflected radiation so that the holographic projection is projected onto the layer. Related systems are also discussed.
Claims66
A method for patterning a layer on a substrate with a desired image, the method comprising the steps of:
- projecting a coherent beam of electrons toward a reflector surface so that a portion of the coherent beam of electrons is reflected off the reflector surface wherein the reflector surface includes information that corresponds to the desired image;
- projecting a portion of the coherent beam of electrons to the layer without reflecting off the reflector surface;
- and
- maintaining the substrate including the layer in the path of the reflected radiation and in the path of the portion of the coherent beam of electrons projected without reflecting off the reflector surface so that the reflected portions of the coherent beam of electrons and portions of the coherent beam of electrons projected without reflecting off the reflector surface interfere to provide a holographic projection of the desired image and so that the holographic projection of the desired image is projected onto the layer to thereby pattern the layer with the desired image.
1 more element
A method for patterning a layer on a substrate with a desired image, the method comprising the steps of:
- projecting coherent radiation along divergent paths toward a reflector surface so that the coherent radiation is reflected off the reflector surface wherein the reflector surface includes information that corresponds to the desired image;
- projecting a portion of the coherent radiation to the layer without reflecting off the reflector surface;
- and
- maintaining the substrate including the layer in the path of the reflected radiation and in the path of the portion of the coherent radiation projected without reflecting off the reflector surface so that the reflected radiation and the coherent radiation projected without reflecting off the reflector surface interfere to provide a holographic projection of the desired image and so that the holographic projection of the desired image is projected onto the layer to thereby pattern the layer with the desired image.
1 more element
A system for patterning a layer on a substrate with a desired image, the system comprising:
- means for projecting a coherent beam of electrons toward a reflector surface so that a portion of the coherent beam of electrons is reflected off the reflector surface wherein the reflector surface includes information that corresponds to the desired image;
- means for projecting a portion of the coherent beam of electrons to the substrate including the layer without reflecting off the reflector surface;
- and
- means for maintaining the substrate including the layer in the path of the reflected portion of the coherent beam of electrons reflected and in the path of the portion of the coherent beam of electrons projected without reflecting off the reflector surface so that the reflected portion of the coherent beam of electrons and the portion of the coherent beam of electrons projected without reflecting off the reflector surface interfere to provide a holographic projection of the desired image and so that the holographic projection of the desired image is projected onto the layer to thereby pattern the layer with the desired image.
1 more element
A system for patterning a layer on a substrate with a desired image, the system comprising:
- means for projecting coherent radiation along divergent paths toward a reflector surface so that the coherent radiation is reflected off the reflector surface wherein the reflector surface includes information that corresponds to the desired image;
- means for projecting a portion of the coherent radiation to the substrate including the layer without reflecting off the reflector surface;
- and
- means for maintaining the substrate including the layer in the path of the reflected radiation and in the path of the portion of the coherent radiation projected without reflecting off the reflector surface so that the reflected radiation and the coherent radiation projected without reflecting off the reflector surface interfere to provide a holographic projection of the desired image and so that the holographic projection of the desired image is projected onto the layer to thereby pattern the layer with the desired image.
1 more element
A system for patterning a layer on a substrate surface with a desired image, the system comprising:
- a radiation source that is configured to project coherent beam of electrons toward a reflector surface so that a portion of the coherent beam of electrons is reflected off the reflector surface and so that a portion of the coherent beam of electrons is projected to the layer without reflecting off the reflector surface so that the portion of the coherent beam of electrons reflected of the reflector surface and the portion of the coherent beam of electrons projected without reflecting off the reflector surface interfere to project a holographic projection of the desired image on the layer so that the holographic projection of the desired image is used to pattern the layer with the desired image.
A system for patterning a layer on a substrate surface with a desired image, the system comprising:
- a radiation source that is configured to project coherent radiation along divergent paths toward a reflector surface so that the coherent radiation is reflected off the reflector surface and so that a portion of the coherent radiation is projected to the layer without reflecting off the reflector surface so that the coherent radiation reflected of the reflector surface and the coherent radiation projected without reflecting off the reflector surface interfere to project a holographic projection of the desired image on the layer so that the holographic projection of the desired image is used to pattern the layer with the desired image.
Dependencies are inferred from the claim text.