Method of making a spin valve sensor with a controlled ferromagnetic coupling field
AssigneeHitachi Global Storage Technologies Netherlands B.V.
InventorMustafa Pinarbasi
Life of this patent
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Abstract
A pinned layer structure of a spin valve sensor is formed by sputter deposition of cobalt iron (CoFe) in a nitrogen (N2) atmosphere. This method permits a wider range of deposition times of a copper spacer layer to achieve a desirable ferromagnetic coupling field (HF) between the pinned layer structure and a free layer structure in the spin valve sensor.
Claims37
A method of making a magnetic read head which has an air bearing surface (ABS), comprising the steps of:
- a making a spin valve sensor comprising the steps of:
- forming a ferromagnetic first pinned layer structure that has a magnetic moment;
- forming an antiferromagnetic first pinning layer exchange coupled to the first pinned layer structure for pinning the magnetic moment of the first pinned layer structure;
- forming a ferromagnetic free layer structure;
- forming a nonmagnetic electrically conductive first spacer layer between the free layer structure and the first pinned layer structure;
- and
- forming the first pinned layer structure by sputter deposition of cobalt (Co) or a cobalt based alloy in a nitrogen (N2) atmosphere.
A method of making magnetic head assembly that has an air bearing surface (ABS), comprising the steps of:
- making a write head including the steps of:
- forming ferromagnetic first and second pole piece layers in pole tip, yoke and back gap regions wherein the yoke region is located between the pole tip and back gap regions;
- forming a nonmagnetic electrically nonconductive write gap layer between the first and second pole piece layers in the pole tip region;
- forming an insulation stack with at least one coil layer embedded therein between the first and second pole piece layers in the yoke region;
- and
- connecting the first and second pole piece layers at said back gap region;
- making a read head including the steps of:
- forming nonmagnetic electrically nonconductive first and second read gap layers;
- forming a spin valve sensor between the first and second read gap layers;
- and
- forming the first and second read gap layers between the first shield layer and the first pole piece layer;
- a making of the spin valve sensor comprising the steps of:
- forming a ferromagnetic first pinned layer structure that has a magnetic moment;
- forming an antiferromagnetic first pinning layer exchange coupled to the first pinned layer structure for pinning the magnetic moment of the first pinned layer structure;
- forming a ferromagnetic free layer structure;
- forming a nonmagnetic electrically conductive first spacer layer between the free layer structure and the first pinned layer structure;
- and
- forming the first pinned layer structure by sputter deposition of cobalt (Co) or a cobalt based alloy in a nitrogen (N2) atmosphere.
A magnetic read head which has an air bearing surface (ABS), comprising:
- a spin valve sensor including:
- a ferromagnetic first pinned layer structure that has a magnetic moment;
- an antiferromagnetic first pinning layer exchange coupled to the first pinned layer structure for pinning the magnetic moment of the first pinned layer structure;
- a ferromagnetic free layer structure;
- a nonmagnetic electrically conductive first spacer layer located between the free layer structure and the first pinned layer structure;
- and
- the first pinned layer structure having been formed by sputter deposition of cobalt (Co) or a cobalt based alloy in a nitrogen (N2) atmosphere.
A magnetic head assembly having an air bearing surface (ABS), comprising:
- a write head including:
- ferromagnetic first and second pole piece layers that have a yoke portion located between a pole tip portion and a back gap portion;
- a nonmagnetic write gap layer located between the pole tip portions of the first and second pole piece layers;
- an insulation stack with at least one coil layer embedded therein located between the yoke portions of the first and second pole piece layers;
- and
- the first and second pole piece layers being connected at their back gap portions;
- and
- a read head including:
- a spin valve sensor;
- nonmagnetic electrically nonconductive first and second read gap layers;
- the spin valve sensor being located between the first and second read gap layers;
- a ferromagnetic first shield layer;
- and
- the first and second gap layers being located between the first shield layer and the first pole piece layer;
- and
- the spin valve sensor including:
- a ferromagnetic first pinned layer structure that has a magnetic moment;
- an antiferromagnetic first pinning layer exchange coupled to the first pinned layer structure for pinning the magnetic moment of the first pinned layer structure;
- a ferromagnetic free layer structure;
- a nonmagnetic electrically conductive first spacer layer located between the free layer structure and the first pinned layer structure;
- and
- the first pinned layer structure having been formed by sputter deposition of cobalt (Co) or a cobalt based alloy in a nitrogen (N2) atmosphere.
A magnetic disk drive including at least one magnetic head assembly that has an air bearing surface (ABS) and that includes a write head and a read head, comprising:
- a write head including:
- ferromagnetic first and second pole piece layers that have a yoke portion located between a pole tip portion and a back gap portion;
- a nonmagnetic write gap layer located between the pole tip portions of the first and second pole piece layers;
- an insulation stack with at least one coil layer embedded therein located between the yoke portions of the first and second pole piece layers;
- and
- the first and second pole piece layers being connected at their back gap portions;
- and
- a read head including:
- a spin valve sensor;
- nonmagnetic electrically nonconductive first and second read gap layers;
- the spin valve sensor being located between the first and second read gap layers;
- a ferromagnetic first shield layer;
- and
- the first and second read gap layers being located between the first shield layer and the first pole piece layer;
- and
- the spin valve sensor including:
- a ferromagnetic first pinned layer structure that has a magnetic moment;
- an antiferromagnetic first pinning layer exchange coupled to the first pinned layer structure for pinning the magnetic moment of the first pinned layer structure;
- a ferromagnetic free layer structure;
- a nonmagnetic electrically conductive first spacer layer located between the free layer structure and the first pinned layer structure;
- and
- the first pinned layer structure having been formed by sputter deposition of cobalt (Co) or a cobalt based alloy in a nitrogen (N2) atmosphere;
- a housing;
- a magnetic disk rotatably supported in the housing;
- a support mounted in the housing for supporting the magnetic head assembly with said ABS facing the magnetic disk so that the magnetic head assembly is in a transducing relationship with the magnetic disk;
- a spindle motor for rotating the magnetic disk;
- an actuator positioning means connected to the support for moving the magnetic head assembly to multiple positions with respect to said magnetic disk;
- and
- a processor connected to the magnetic head assembly, to the spindle motor and to the actuator for exchanging signals with the magnetic head assembly, for controlling movement of the magnetic disk and for controlling the position of the magnetic head assembly.
Dependencies are inferred from the claim text.