Catadioptric optical system and exposure apparatus having the same

A projection exposure lens system, comprising:

• a catadioptric system, an intermediate image, and a refractive lens system, in which said catadioptric system has at least one deflecting element, a concave mirror and a plurality of lenses between said at least one deflecting element and said concave mirror, and in which said concave mirror and all lenses arranged between said deflecting element and said concave mirror are arranged in a compact unit.

A projection exposure lens system, comprising:

• a catadioptric system, in which said catadioptric system has at least one deflecting element, at least one concave mirror and a plurality of lenses, and in which said catadioptric system has at least one positive lens between an object and a first deflecting element, and not more than one positive and not more than three negative lenses between said first deflecting element and said concave mirror.

A projection exposure lens system comprising:

• a catadioptric system, and intermediate image and a refractive lens system, in which said refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

A projection exposure lens system comprising:

• a catadioptric system, an intermediate image, and a refractive lens system, in which at least one −+ power doublet with a negative power lens and a positive power lens in this sequence from an object side is arranged in said refractive lens system.

A projection exposure lens system comprising:

• a catadioptric system, an intermediate image, and a refractive lens system, in which said refractive lens system comprises a field lens group, an intermediate correcting lens group and a focussing lens group.

A projection exposure lens system comprising:

• a catadioptric system, an intermediate image, and a refractive lens system, in which said catadioptric system has an imaging ratio of greater than 0.95, and different from unity.

A projection exposure lens system, comprising:

• a refractive lens system and on an object side of the refractive lens system a catadioptric system generating an intermediate image, with lenses made of a first material and lenses made of a second material, in which no more than four lenses are made of said second material.

A projection exposure lens system, comprising:

• a refractive lens system and on an object side of the refractive lens system a catadioptric system generating an intermediate image, with lenses made of a first material and lenses made of a second material, in which no more than four lenses are made of said second material, in which said catadioptric system has at least one deflecting element, a concave mirror and a plurality of lenses between said at least one deflecting element and said concave mirror, and in which said concave mirror and all lenses arranged between said deflecting element and said concave mirror are arranged in a compact unit.

A projection exposure lens system comprising:

• a refractive lens system and on an object side of the refractive lens system a catadioptric system generating an intermediate image, with lenses made of a first material and lenses made of a second material, in which no more than four lenses are made of said second material, in which said refractive lens system from its intermediate image side and in the direction of its image plane has a first lens group of positive refractive power, a second lens group of negative refractive power, a third lens group of positive refractive power, a fourth lens group of negative refractive power, and a fifth lens group of positive refractive power.

A projection exposure lens system comprising:

• a refractive lens system and on an object side of the refractive lens system a catadioptric system generating an intermediate image, with lenses made of a first material and lenses made of a second material, in which no more than four lenses are made of said second material, in which at least one −+ power doublet with a negative power lens and a positive power lens in this sequence from an object side is arranged in said refractive lens system.

A projection exposure lens system comprising:

• a refractive lens system and on an object side of the refractive lens system a catadioptric system generating an intermediate image, with lenses made of a first material and lenses made of a second material, in which no more than four lenses are made of said second material, in which said refractive lens system comprises a field lens group, an intermediate correcting lens group and a focusing lens group.

A projection exposure lens system, comprising:

• a refractive lens system and on an object side of the refractive lens system a catadioptric system generating an intermediate image, with lenses made of a first material and lenses made of a second material, in which no more than four lenses are made of said second material, in which said catadioptric system has an imaging ratio of greater than 0.95, and different from unity.

A projection exposure lens system comprising a refractive lens system with a first lens second next to its image plane and a second lens next to its image plane, said first lens being concave on its image ward surface, said second lens being convex on its surface facing said first lens, said concave surface and said convex surface being substantially concentric.