Optical measurement arrangement
AssigneeLeica Microsystems Jena GmbH
InventorsMatthias Slodowski, Detlef Wolter
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Abstract
The invention concerns an optical measurement arrangement, in particular for the examination of layer systems, and comprises an illumination device having at least one illumination source for delivering a measurement light beam and coupling it into the beam path of a layer thickness measuring instrument. In such a measurement arrangement, the illumination device is housed in a lamp housing that is detachably connected to the remaining portion of the measurement arrangement via an installation element, the illumination sources being prealigned with respect to the beam path.
Claims9
An optical measurement arrangement defining at least one illumination beam path, in particular for the examination of systems of thin layers, comprises:
- a lamp housing having at least one illumination source for delivering at least one measurement light beam into the illumination beam path of the optical measurement arrangement, and
- an installation element connecting the lamp housing detachably to the optical measurement arrangement, wherein the at least one illumination source is prealigned in the lamp housing, so that the measurement light beam of the at least one illumination source coincides with the at least one illumination beam path of the optical measurement arrangement.
Dependencies are inferred from the claim text.