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US 2004/0169859 A1Published application
Modulated scatterometry
AssigneeTherma-Wave, Inc.
InventorWalter Lee Smith
Life of this patent
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Abstract
An apparatus for scatterometry measurements is disclosed. The apparatus includes a modulated pump source for exciting the sample. A separate probe beam is directed to interact with the sample and the modulated optical response is measured. The measured data is subjected to a scatterometry analysis in order to evaluate geometrical sample features that induce light scattering.
Claims9
An apparatus for evaluating a sample have light diffracting features comprising:
- an intensity modulated energy source for periodically exciting the sample;
- a probe beam directed to reflect off the sample in the region which has been periodically excited;
- a detector for monitoring the probe beam after interaction with the sample and generating output signals;
- and
- a processor for filtering the output signals to determine the modulated optical scattering of the light and wherein the modulated optical scattering response is analyzed according to a scatterometry analysis to evaluate the light diffracting features on the sample.
2 more elements
A method for evaluating a sample have light diffracting features comprising the steps of:
- periodically exciting a region on the sample;
- directing a probe beam of radiation to reflect off a portion of the region which has been periodically excited;
- monitoring the probe beam after interaction with the sample and generating output signals;
- and
- filtering the output signals to determine the modulated optical scattering of the light and wherein the modulated optical scattering response is analyzed according to a scatterometry analysis to evaluate the light diffracting features on the sample.
2 more elements
Dependencies are inferred from the claim text.