Surface inspection apparatus
OwnerYoichiro Iwa, Kazuhiro Miyakawa +1inventors
InventorsYoichiro Iwa, Kazuhiro Miyakawa, Akihiko Sekine
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Abstract
A surface inspection apparatus for detecting foreign matter and the like on a surface of a substrate by projecting and scanning laser beams to the surface of the substrate, comprising a light source unit for projecting two or more laser beams, and a projecting optical system for converging the laser beams so that the two or more laser beams are aligned in a row in a direction perpendicularly crossing the scanning direction at a projecting point on the substrate.
Claims6
A surface inspection apparatus for detecting foreign matter and the like on a surface of a substrate by projecting and scanning laser beams to the surface of the substrate, comprising a light source unit for projecting two or more laser beams, and a projecting optical system for converging the laser beams so that the two or more laser beams are aligned in a row in a direction perpendicularly crossing the scanning direction at a projecting point on the substrate.
Dependencies are inferred from the claim text.