Liquid-jet head, fabricating method of the same, and liquid-jet apparatus
AssigneeSeiko Epson Corporation
InventorMasami Murai
Life of this patent
Estimating the term…
Loading patent…
AssigneeSeiko Epson Corporation
InventorMasami Murai
Estimating the term…
A liquid-jet head effective in prevention of imperfect eject such as occlusion of a nozzle, a method of fabricating the liquid-jet head, and a liquid-jet apparatus are provided. In a liquid-jet head having a passage-forming substrate on which a pressure-generating chamber communicating with a nozzle orifice is formed, a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements comprising a lower electrode, a piezoelectric layer and an upper electrode, the passage-forming substrate is provided with a communicating path communicating with one end in a longitudinal direction of the pressure-generating chamber so as to penetrate the passage-forming substrate. In addition, a penetrated portion for supplying a liquid to the communicating path is formed in a region of the vibration plate opposite to the communicating path by laser processing.
A liquid-jet head including a passage-forming substrate on which a pressure-generating chamber communicating with a nozzle orifice is formed, and a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements comprising a lower electrode, a piezoelectric layer and an upper electrode, the liquid-jet head comprising:
A method of fabricating a liquid-jet head including a passage-forming substrate on which a pressure-generating chamber communicating with a nozzle orifice is formed, a plurality of piezoelectric elements provided on one side of the passage-forming substrate via a vibration plate, each of the piezoelectric elements comprising a lower electrode, a piezoelectric layer and an upper electrode, the method comprising the steps of:
Dependencies are inferred from the claim text.